机读格式显示(MARC)

• 000 01106cam a2200325 a 4500

• 001 0000052511

• 003 CAL

• 005 20120924145500.0

• 008 030528r20032001cc a b 001 0 eng d

• 020 __ |a 7505386263 (pbk.)

• 040 __ |a BUPT |c BUPT |d NUL

• 041 0_ |a eng |b chi

• 050 00 |a TK7871.85 |b .C25 2001

• 082 00 |a 621.3815/2 |2 21

• 090 __ |a TN405/E1

• 093 __ |a TN405 |2 4

• 093 __ |a TN302 |2 4

• 094 __ |a 73.7515 |2 3

• 099 __ |a CAL 022003097733

• 100 1_ |a Campbell, Stephen A., |d 1954-

• 245 14 |a The science and engineering of microelectronic fabrication = |b 微电子制造科学原理与工程技术 / |c Stephen A. Campbell著.

• 246 11 |a 微电子制造科学原理与工程技术

• 250 __ |a 2nd ed.

• 260 __ |a Beijing : |b Publishing House of Electronics Industry, |c 2003.

• 300 __ |a 14, 603 p. : |b ill. ; |c 24 cm.

• 440 _0 |a 国外电子与通信教材系列

• 504 __ |a Includes bibliographical references and index.

• 534 __ |p Reprint. Originally published: |c New York : Oxford University Press, 2001. |b 2nd ed. |z 0195136055.

• 650 _0 |a Semiconductors |x Design and construction.

• 920 __ |a 222016 |z 2