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题名/责任者:

Silicon VLSI technology : fundamentals, practice and modeling = 硅超大规模集成电路工艺技术 : 理论、实践与模型 / James D. Plummer, Michael Deal, Peter B. Griffin著.

出版发行项:

Beijing : Pub. House of Electronics Industry ; Pearson Education, 2003.

ISBN:

7505386387

载体形态项:

18, 817 p. : ill. ; 23 cm.

变异题名:

硅超大规模集成电路工艺技术 : 理论、实践与模型

丛编题名:

国外电子与通信教材系列

个人责任者:

Plummer, James D.

附加个人名称:

Deal, Michael D.

附加个人名称:

Griffin, Peter B.

论题主题:

Integrated circuits-Very large scale integration-Design and construction.

论题主题:

Silicon.

论题主题:

Silicon oxide films.

论题主题:

Metal oxide semiconductors.

论题主题:

Silicon-on-insulator technology.

中图法分类号:

TN47

书目附注:

Includes bibliographical references and index.

原版附注:

Reprint. Originally published: Upper Saddle River, NJ : Prentice Hall, c2000. 0130850373.

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